高精(jīng)密光(guāng)學(xué)鏡面采用(yòng)超精(jīng)密數(shù)控研磨與(yǔ)離(lí)子(zǐ)束抛光(guāng)工(gōng)藝(yì),實(shí)現(xiàn)納米(mǐ)級(jí)面形(xíng)精(jīng)度,其(qí)中大(dà)口(kǒu)徑(jìng)鏡面(≥1米(mǐ))波(bō)像(xiàng)差(chā)可(kě)加(jiā)工(gōng)至(zhì)λ/60(@632.8nm);中小(xiǎo)口(kǒu)徑(jìng)鏡面通過磁流(liú)變(biàn)抛光(guāng)確(què)定(dìng)性(xìng)修(xiū)形(xíng),波(bō)像(xiàng)差(chā)可(kě)加(jiā)工(gōng)至(zhì)λ/60-λ/80(@632.8nm)。